Electrostatically Actuated Micromirror Array Assembled by Using Solder Flip Chip Bonding and Electro-Thermal Fuse-Away Tethers
نویسندگان
چکیده
منابع مشابه
Electrostatically Actuated 2-dimensional Mems Micromirror
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ژورنال
عنوان ژورنال: Journal of Japan Institute of Electronics Packaging
سال: 2005
ISSN: 1343-9677,1884-121X
DOI: 10.5104/jiep.8.108